Tekhnologiya i Konstruirovanie v Elektronnoi Apparature (Dec 2008)

Conductive BaCuTeF thin films for transparent contacts for semiconductor electronics

  • Hotra Z. Y.,
  • Tate J.,
  • Kykyneshi R.,,
  • Zakutayev A. A.,
  • Rakobovchuk L.M.

Journal volume & issue
no. 6
pp. 54 – 57

Abstract

Read online

Сhemical composition, structural and electrical properties of the BaCuTeF thin films were investigated. Dependence of the copper excess on the deposition parameters was studied. Excess of copper improves the electrical properties of the films by means of increasing the hole mobility. BaCuTeF thin films can be used as transparent p++-contacts for semiconductor electronics devices.

Keywords