A new Mach–Zehnder interference temperature measuring sensor based on silica-based chip

Abstract

Abstract A new type of silicon-based Mach–Zehnder interference (MZI) temperature sensor chip with “mosquito coil” structure was designed. The sensor chip used a new MZI interference structure. After the light entered the chip, it split and interfered in the combiner of the chip. The change in the surrounding temperature will cause the refractive index of the waveguide to change, which will cause the output light intensity to change. The sensor used a frequency stabilized laser that was based on a Bragg grating fiber. The experimental results showed that this structure could achieve a resolution of 0.002 °C and measuring range of 30 °C.