Highly Sensitive and Selective Sol-Gel Spin-Coated Composite TiO<sub>2</sub>–PANI Thin Films for EGFET-pH Sensor
Nur Syahirah Kamarozaman,
Nurbaya Zainal,
Aimi Bazilah Rosli,
Muhammad Alhadi Zulkefle,
Nik Raikhan Nik Him,
Wan Fazlida Hanim Abdullah,
Sukreen Hana Herman,
Zurita Zulkifli
Affiliations
Nur Syahirah Kamarozaman
Integrated Sensors Research Group, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA (UiTM), Shah Alam 40450, Selangor, Malaysia
Nurbaya Zainal
Integrated Sensors Research Group, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA (UiTM), Shah Alam 40450, Selangor, Malaysia
Aimi Bazilah Rosli
Integrated Sensors Research Group, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA (UiTM), Shah Alam 40450, Selangor, Malaysia
Muhammad Alhadi Zulkefle
Integrated Sensors Research Group, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA (UiTM), Shah Alam 40450, Selangor, Malaysia
Nik Raikhan Nik Him
Integrated Sensors Research Group, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA (UiTM), Shah Alam 40450, Selangor, Malaysia
Wan Fazlida Hanim Abdullah
Integrated Sensors Research Group, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA (UiTM), Shah Alam 40450, Selangor, Malaysia
Sukreen Hana Herman
Integrated Sensors Research Group, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA (UiTM), Shah Alam 40450, Selangor, Malaysia
Zurita Zulkifli
NANO-ElecTronic Centre, School of Electrical Engineering, College of Engineering, Universiti Teknologi MARA (UiTM), Shah Alam 40450, Selangor, Malaysia
A highly selective and sensitive EGFET-pH sensor based on composite TiO2–PANI had been developed in this work. A sol-gel titanium dioxide (TiO2) and the composite of TiO2 with semiconducting polyaniline (PANI) were deposited using a simple spin-coating method on an indium tin oxide (ITO) substrate. The films have been explored as a sensing electrode (SE) of extended gate field-effect transistor (EGFET) for pH applications in the range of pH 2 to 12. The pH sensitivities between TiO2, TiO2–PANI bilayer composite, and TiO2–PANI composite thin films were discussed. Among these, the TiO2–PANI composite thin film showed a super-Nernstian behavior with high sensitivity of 66.1 mV/pH and linearity of 0.9931; good repeatability with a standard deviation of 0.49%; a low hysteresis value of 3 mV; and drift rates of 4.96, 5.54, and 3.32 mV/h in pH 4, 7, and 10, respectively, for 6 h. Upon applying the TiO2–PANI composite as the SE for nitrate measurement, low sensitivity of 12.9 mV/dec was obtained, indicating that this film is a highly selective sensing electrode as a pH sensor. The surface morphology and crystallinity of the thin films were also discussed.