Active and Passive Electronic Components (Jan 1981)

Electrical Properties of Titanium Nitride Thin Films Deposited by Reactive Sputtering

  • T. Muto,
  • K. Kawabata

DOI
https://doi.org/10.1155/APEC.8.249
Journal volume & issue
Vol. 8, no. 3-4
pp. 249 – 249

Abstract

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