Localized and In-Situ Integration of Different Nanowire Materials for Electronic Nose Applications
Guillem Domènech-Gil,
Lukas Hrachowina,
Antonio Pardo,
Michael S. Seifner,
Isabel Gràcia,
Carles Cané,
Sven Barth,
Albert Romano-Rodríguez
Affiliations
Guillem Domènech-Gil
Department of Electronic and Biomedical Engineering, Universitat de Barcelona (UB), 08028 Barcelona, Spain
Lukas Hrachowina
Institute of Materials Chemistry, Vienna University of Technology (TUW), 1060 Vienna, Austria
Antonio Pardo
Department of Electronic and Biomedical Engineering, Universitat de Barcelona (UB), 08028 Barcelona, Spain
Michael S. Seifner
Institute of Materials Chemistry, Vienna University of Technology (TUW), 1060 Vienna, Austria
Isabel Gràcia
Institut de Microelectrònica de Barcelona-Centre Nacional de Microelectrònica, Consejo Superior de Investigaciones Científicas (CSIC), 08193 Bellaterra, Spain
Carles Cané
Institut de Microelectrònica de Barcelona-Centre Nacional de Microelectrònica, Consejo Superior de Investigaciones Científicas (CSIC), 08193 Bellaterra, Spain
Sven Barth
Institute of Materials Chemistry, Vienna University of Technology (TUW), 1060 Vienna, Austria
Albert Romano-Rodríguez
Institute of Nanoscience and Nanotechnology (IN2UB), Universitat de Barcelona (UB), 08028 Barcelona, Spain
A new method for the site-selective synthesis of nanowires has been developed to enable the material growth with specific morphology and different compositions on one single chip. Based on a modification of the chemical vapor deposition method, the growth of nanowires on top of micromembranes can be easily tuned and represents a simple and adjustable fabrication process for the direct integration of different nanowire-based resistive multifunctional devices. This proof-of-concept is exemplified by the deposition of SnO2, WO3 and Ge nanowires on the membranes of one single chip and their gas sensing responses towards different concentrations of CO, NO2 and humidity diluted in synthetic air are evaluated. The principal component analysis of the collected data allows gas identification and, thus, the system is suitable for environmental monitoring.
