AIP Advances (Nov 2024)

A comparative study of Schottky barrier heights and charge transport mechanisms in 3C, 4H, and 6H silicon carbide polytypes

  • Fayssal Mekaret,
  • Abdelaziz Rabehi,
  • Baya Zebentout,
  • Shahrazade Tizi,
  • Abdelmalek Douara,
  • Stefano Bellucci,
  • Mawloud Guermoui,
  • Zineb Benamara,
  • El-Sayed M. El-kenawy,
  • Marwa M. Eid,
  • Amel Ali Alhussan

DOI
https://doi.org/10.1063/5.0240123
Journal volume & issue
Vol. 14, no. 11
pp. 115302 – 115302-14

Abstract

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This study undertakes a comparative analysis of Schottky diodes using three prominent SiC polytypes (3C, 4H, and 6H). The comparison involves meticulous calculations of the Schottky barrier resulting from the metal/SiC interface for each polytype assessed in both practical and theoretical scenarios. Specifically, the barrier height (ΦB) is systematically plotted against the metal work function (ΦM) across a range of metal work functions from 3.65 to 5.65 eV. Furthermore, the investigation extends to the saturation currents of three distinct charge transport models for each SiC polytype: thermionic current (TE), thermionic field emission, and field emission. Initial analyses plot saturation currents as a function of concentration within a temperature range of 100–500 K. Subsequent examinations plot saturation currents as a function of temperature across a concentration gradient from 1014 to 1020 cm−3. The comparison between the activation energy and thermal energy at standard room temperature (T = 300 K) yielded results consistent with theoretical predictions, affirming the robustness and applicability of each model within its dominant range.