Progress in high-performance stick-slip piezoelectric actuators: a review

Abstract

The ultra-precision field is popular for its micro-nanometer positioning accuracy and large working stroke. Piezoelectric actuators based on the stick-slip operational principle exhibit superior performance characteristics, making them stand out with unique advantages in this field. This paper provides a comprehensive review of the developments in stick-slip piezoelectric actuators over recent years. Starting with a detailed explanation of their operating principles, the article proceeds with a brief introduction to the more commonly used driving waveforms and their applications. Subsequently, various design and optimization technologies for existing compliant mechanisms are presented. Furthermore, stick-slip piezoelectric actuators are categorized based on different motion forms, including linear, rotary, and multi-degree of freedom types. Each category is thoroughly examined in terms of structural design and performance features. Following this, the discussion shifts toward controller method research and friction modeling analysis, featuring a particular emphasis on the advancements related to displacement backlash suppression studies. This systematic summary aims to provide a reference for researchers within related fields, thereby facilitating the further development and application of stick-slip piezoelectric actuators.

Keywords

• Piezoelectric actuator
• stick-slip motion principle
• flexure mechanism
• positioning accuracy