Applications of the LTCC ceramics in microplasma systems

Abstract

In this paper the current status of microplasma devices and systems made in the LTCC technology is presented. The microplasma characteristics and applications are described.We discuss the properties of the LTCC materials, that are necessary for reliable operation of the sources. This material is well known for its good reliability and durability in harsh conditions. Still, only a few examples of such microplasma sources are described. Some of them have been developed by the authors and successfully used for chemical analysis and synthesis.

Keywords

• microplasma
• low-temperature co-fired ceramics
• microsystems