Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

Quan Wen; Hongjie Lei; Fan Yu; Dongling Li; Yin She; Jian Huang; Liangkun Huang; Zhiyu Wen

doi:10.3390/app8122412

Applied Sciences (Nov 2018)

Investigation of Electromagnetic Angle Sensor Integrated in FR4-Based Scanning Micromirror

Quan Wen,
Hongjie Lei,
Fan Yu,
Dongling Li,
Yin She,
Jian Huang,
Liangkun Huang,
Zhiyu Wen

Affiliations

Quan Wen: Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Hongjie Lei: Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Fan Yu: Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Dongling Li: Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Yin She: Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Jian Huang: Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Liangkun Huang: Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Zhiyu Wen: Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China

DOI: https://doi.org/10.3390/app8122412
Journal volume & issue: Vol. 8, no. 12
p. 2412

Abstract

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This paper performs a detailed investigation on the electromagnetic angle sensor integrated in the flame retardant 4 (FR4)-based scanning micromirror. An accurate theoretical model is presented, especially considering the coupling effect between the driving and sensing coils. Experimental results agree well with the theoretical results, and show a sensitivity of 55.0 mVp/° and a high signal-to-noise ratio (SNR) of 71.9 dB. Moreover, the linearity of the angle sensor can still reach 0.9995, though it is affected slightly by the coupling effect. Finally, the sensor’s good feasibility for feedback control has been further verified through a simple closed-loop control circuit. The micromirror operated with closed-loop control possesses better long-term stability and temperature stability than that operated without closed-loop control.

Published in Applied Sciences

ISSN: 2076-3417 (Online)
Publisher: MDPI AG
Country of publisher: Switzerland
LCC subjects: Technology: Engineering (General). Civil engineering (General); Science: Biology (General); Science: Physics; Science: Chemistry
Website: http://www.mdpi.com/journal/applsci

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