A Dynamic Micro Force Sensing Probe Based on PVDF

Abstract

Polyvinylidene fluoride (PVDF) membrane structure is presented as micro-force sensor which has potential applications in dynamic amplitude modulation scanning probe microscopy (SPM). Driven by two symmetric aligned PZT actuators near its resonance, the membrane has high force and spatial sensitivity. Glued at the bottom of the membrane’s center, an electrochemical etched tungsten stylus is utilized as micro force picker which has high height diameter ratio. Experiments are conducted to verify its dynamic performance like resonant frequencies, spring constant, quality factor and spatial sensitivity of this micro-force sensing probe. This micro-force sensor can be used for high step height surface topographic measurement of soft materials with little damage.

Keywords

• PVDF
• resonant vibration
• micro-force sensor
• SPM