ACS Omega (Oct 2023)

Thermal Stability and Orthogonal Functionalization of Organophosphonate Self-Assembled Monolayers as Potential Liners for Cu Interconnect

Yu-Wei Chou,
Shou-Yi Chang,
Pei Yuin Keng

Affiliations

Yu-Wei Chou
Shou-Yi Chang
Pei Yuin Keng

DOI: https://doi.org/10.1021/acsomega.3c05629
Journal volume & issue: Vol. 8, no. 42
pp. 39699 – 39708

Abstract

No abstracts available.

Published in ACS Omega

ISSN: 2470-1343 (Online)
Publisher: American Chemical Society
Country of publisher: United States
LCC subjects: Science: Chemistry
Website: https://pubs.acs.org/journal/acsodf

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