Performance and Characterization of Additively Manufactured BST Varactor Enhanced by Photonic Thermal Processing

Abstract

The demand for reconfigurable devices for emerging RF and microwave applications has been growing in recent years, with additive manufacturing and photonic thermal treatment presenting new possibilities to supplement conventional fabrication processes to meet this demand. In this paper, we present the realization and analysis of barium–strontium–titanate-(Ba0.5Sr0.5TiO3)-based ferroelectric variable capacitors (varactors), which are additively deposited on top of conventionally fabricated interdigitated capacitors and enhanced by photonic thermal processing. The ferroelectric solution with suspended BST nanoparticles is deposited on the device using an ambient spray pyrolysis method and is sintered at low temperatures using photonic thermal processing by leveraging the high surface-to-volume ratio of the BST nanoparticles. The deposited film is qualitatively characterized using SEM imaging and XRD measurements, while the varactor devices are quantitatively characterized by using high-frequency RF measurements from 300 MHz to 10 GHz under an applied DC bias voltage ranging from 0 V to 50 V. We observe a maximum tunability of 60.6% at 1 GHz under an applied electric field of 25 kV/mm (25 V/μm). These results show promise for the implementation of photonic thermal processing and additive manufacturing as a means to integrate reconfigurable ferroelectric varactors in flexible electronics or tightly packaged on-chip applications, where a limited thermal budget hinders the conventional thermal processing.

Keywords

• barium–strontium–titanate (BST)
• interdigitated capacitors
• additive manufacturing
• spray pyrolysis
• photonic sintering