Design of Precise Synchrone Mechanism in Multiaxial Laser Measurement

Abstract

Precision measurement is the premise of precision motion control. When a worktable is operating, the synchronization of multiaxial sampling will directly affect the precision of table position conversion. In this paper, a precise synchrone mechanism for multiaxial laser measurement was proposed. Tests showed that the maximum synchronous sampling time error from 6 laser axes was 0.404 ns. When the table was moving at 1 m/s, the induced maximum displacement conversion error was 0.202 nm, which satisfied the strict nanometer-scale requirement imposed by ultra-precise motion control for position measurement.