Advances of materials science in MEMS applications: A review

Abstract

MEMS, or microelectromechanical systems, have greatly transformed multiple industries with their small size and adaptable capabilities. MEMS technology in biosensing allows for rapid and accurate identification of biological analytes, assisting in medical diagnoses and therapies. MEMS-based biosensors provide label-free detection, improving early disease screening and customized medicine administration. MEMS devices in healthcare enable uninterrupted patient monitoring and telemedicine, leading to substantial enhancements in healthcare results. Nevertheless, obstacles remain, such as the requirement for improved biocompatibility and durability under very demanding conditions. In order to overcome these restrictions, current research is dedicated to advancing materials that are compatible with living organisms, improving processes used to create small-scale structures, and incorporating wireless monitoring systems. To fully exploit the capabilities of MEMS biosensors, it is crucial to prioritize these improvements. This will facilitate their smooth integration into different industries and contribute to the industry's significant growth.

Keywords

• MEMS
• Fabrication
• Materials science
• Biosensors
• Applications