Tekhnologiya i Konstruirovanie v Elektronnoi Apparature (Dec 2007)

Formation of nanostructured iridium and polycluster diamond films

  • Pashchenko P. V.,
  • Timofeev M. A.,
  • Mitin V. S.,
  • Dzbanovskiy N. N.,
  • Suetin N. V.,
  • Samoylovich M. I.,
  • Pal' A. F.,
  • Belyanin A. F.

Journal volume & issue
no. 6
pp. 50 – 56

Abstract

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Iridium films and layered structures "iridium — diamond" were formed on Al2O3, MgO and SrTiO3 substrates. Iridium films were obtained by magnetron sputtering, and polycluster diamond films — by microwave discharge method. Structure of iridium and diamond films was studied depending on formation conditions. Application of polycluster diamond films as heatsink for hybrid microcircuit and control grid of electronic devices was considered.

Keywords