Eliminating of the Residual Stresses Effect in the Fixed-Fixed End Type MEMS Switches by Piezoelectric Layers

Abstract

In this paper, a novel method has been developed to eliminate the tensile or compressive residual stresses effects that have been created due to the fabrication sequence. In the developed model, the tensile or compressive residual stresses in the fixed-fixed end type MEMS switches have been eliminated by using of two piezoelectric layers that have been located on the upper and lower surfaces of switch. The nonlinear governing differential equation of the fixed-fixed end type MEMS switch has been derived by considering the piezoelectric layers and residual stresses. The pull-in voltage and the switching time have been calculated for different applied voltage to the piezoelectric layers. The results show that the both tensile and residual stresses can be eliminated by means of a small applied voltage to the piezoelectric layers.

Keywords

• MEMS switches
• piezoelectric
• residual stresses
• pull-in voltage
• switching time