Picosecond Pulsed Laser Deposition of Metals and Metal Oxides

Abstract

In this work, we present the fabrication of thin films/nanostructures of metals and metal oxides using picosecond laser ablation. Two sets of experiments were performed: the depositions were carried out in vacuum and in air at atmospheric pressure. The subjects of investigation were the noble metals Au and Pt and the metal oxides ZnO and TiO2. We studied and compared the phase composition, microstructure, morphology, and physicochemical state of the as-deposited samples’ surfaces in vacuum and in air. It was found that picosecond laser ablation performed in vacuum led to the fabrication of thin films with embedded and differently sized nanoparticles. The implementation of the same process in air at atmospheric pressure resulted in the fabrication of porous nanostructures composed of nanoparticles. The ablation of pure Pt metal in air led to the production of nanoparticles with an oxide shell. In addition, more defects were formed on the metal oxide surface when the samples were deposited in vacuum. Furthermore, the laser ablation process of pure Au metal in a picosecond regime in vacuum and in air was theoretically investigated using molecular dynamics simulation.

Keywords

• PLD
• picosecond ablation
• metals
• metal oxides