Method for Selecting the Functioning Modes of the Carriage Drive of Probe Equipment during Transient Processes. Part 2

Abstract

The article presents the results of studies, the analysis of which made it possible to identify features that affect the duration of the main periods of horizontal movement by the carriage drive with the object stage of the probe control equipment, the main of which include the mode of smoothness (dynamics) of movement and the accelerations associated with it during acceleration and braking, provided by the setting of the motor controller, as well as the step of displacement. It is shown that for specific inertia-stiffness and damping characteristics of the probe control equipment, the determination of accelerations for each mode of smoothness and duration of damping of mechanical oscillations after the carriage with the object stage moves to a given coordinate can be carried out in the debug mode of the probe control equipment or automatically using adaptive control. A method is proposed for selecting rational operating modes for the carriage drive with an object stage of probe equipment during transient processes using a database and a displacement step (of crystal size), which makes it possible for each smoothness mode to determine the cyclogram of its displacement and the total duration of the entire cycle, from which the minimum cycle is selected and implemented.

Keywords

• probe equipment
• method
• microelectronics
• transient processes
• performance