DESIGN OF ANTI-IMPАСТ MICRO-ACCELERATION SENSOR IMITATING SHRIMP CLAW

Abstract

Aiming at the damage of a Iow-range micro-electro-mechanical system(MEMS) acceleration sensor under tens of thousands of gn overload during the measurement of outer ballistic information of conventional weapons and ammunition, a kind of shrimp claw anti-impact micro-acceleration sensor was proposed, which could realize the index requirements of anti-overload 30 000gn and range 50gn. The finite element simulation results show that the displacement of the sensor is 0. 99 μm and the sensitivity is 0.124 pF/gn under 50gn load. The maximum equivalent stress of the acceleration sensor under 30 000gn overload is reduced from 1 022.5 MPa to 84.326 MPa, which effectively improved the reliability of the sensor.

Keywords

• Accelerometer
• Impact resistance
• Capacitive
• Low range
• Bionic cushioning structure
• Micro-electro-mechanical system