Frontiers in Physics (Apr 2021)
Novel 3D Pixel Sensors for the Upgrade of the ATLAS Inner Tracker
- Stefano Terzo,
- Maurizio Boscardin,
- Juan Carlotto,
- Gian-Franco Dalla Betta,
- Gian-Franco Dalla Betta,
- Giovanni Darbo,
- Ole Dorholt,
- Francesco Ficorella,
- Giuseppe Gariano,
- Claudia Gemme,
- Giulia Giannini,
- Sebastian Grinstein,
- Sebastian Grinstein,
- Andreas Heggelund,
- Simon Huiberts,
- Angela Kok,
- Ozhan Koybasi,
- Alessandro Lapertosa,
- Alessandro Lapertosa,
- Magne Elk Lauritzen,
- Maria Manna,
- Roberto Mendicino,
- Roberto Mendicino,
- Roberto Mendicino,
- Hideyuki Oide,
- Giulio Pellegrini,
- Marco Povoli,
- David Quirion,
- Ole Myren Rohne,
- Sabina Ronchin,
- Heidi Sandaker,
- Md. Arif Abdulla Samy,
- Md. Arif Abdulla Samy,
- Bjarne Stugu,
- Leonardo Vannoli,
- Leonardo Vannoli
Affiliations
- Stefano Terzo
- Institute for High Energy Physiscs (IFAE), Barcelona Institute of Science and Technology (BIST), Barcelona, Spain
- Maurizio Boscardin
- Bruno Kessler Foundation (FBK), Trento, Italy
- Juan Carlotto
- Institute for High Energy Physiscs (IFAE), Barcelona Institute of Science and Technology (BIST), Barcelona, Spain
- Gian-Franco Dalla Betta
- Trento Institute for Fundamental Physics and Applications (TIFPA), University of Trento, Trento, Italy
- Gian-Franco Dalla Betta
- Department of Industrial Engineering, University of Trento, Trento, Italy
- Giovanni Darbo
- National Institute of Nuclear Physics (INFN) of Genova, Genoa, Italy
- Ole Dorholt
- Department of Physics, University of Oslo, Oslo, Norway
- Francesco Ficorella
- Bruno Kessler Foundation (FBK), Trento, Italy
- Giuseppe Gariano
- National Institute of Nuclear Physics (INFN) of Genova, Genoa, Italy
- Claudia Gemme
- National Institute of Nuclear Physics (INFN) of Genova, Genoa, Italy
- Giulia Giannini
- Institute for High Energy Physiscs (IFAE), Barcelona Institute of Science and Technology (BIST), Barcelona, Spain
- Sebastian Grinstein
- Institute for High Energy Physiscs (IFAE), Barcelona Institute of Science and Technology (BIST), Barcelona, Spain
- Sebastian Grinstein
- Catalan Institution for Research and Advanced Studies (ICREA), Barcelona, Spain
- Andreas Heggelund
- Department of Physics, University of Oslo, Oslo, Norway
- Simon Huiberts
- Department of Physics and Technology, University of Bergen, Bergen, Norway
- Angela Kok
- SINTEF DIGITAL, Oslo, Norway
- Ozhan Koybasi
- SINTEF DIGITAL, Oslo, Norway
- Alessandro Lapertosa
- National Institute of Nuclear Physics (INFN) of Genova, Genoa, Italy
- Alessandro Lapertosa
- 0Department of Physics, University of Genoa, Genoa, Italy
- Magne Elk Lauritzen
- Department of Physics and Technology, University of Bergen, Bergen, Norway
- Maria Manna
- 1Centre Nacional de Microelectrónica (CNM), Consejo Superior de Investigaciones Científicas (CSIC), Barcelona, Spain
- Roberto Mendicino
- Bruno Kessler Foundation (FBK), Trento, Italy
- Roberto Mendicino
- Trento Institute for Fundamental Physics and Applications (TIFPA), University of Trento, Trento, Italy
- Roberto Mendicino
- Department of Industrial Engineering, University of Trento, Trento, Italy
- Hideyuki Oide
- National Institute of Nuclear Physics (INFN) of Genova, Genoa, Italy
- Giulio Pellegrini
- 1Centre Nacional de Microelectrónica (CNM), Consejo Superior de Investigaciones Científicas (CSIC), Barcelona, Spain
- Marco Povoli
- SINTEF DIGITAL, Oslo, Norway
- David Quirion
- 1Centre Nacional de Microelectrónica (CNM), Consejo Superior de Investigaciones Científicas (CSIC), Barcelona, Spain
- Ole Myren Rohne
- Department of Physics, University of Oslo, Oslo, Norway
- Sabina Ronchin
- Bruno Kessler Foundation (FBK), Trento, Italy
- Heidi Sandaker
- Department of Physics, University of Oslo, Oslo, Norway
- Md. Arif Abdulla Samy
- Trento Institute for Fundamental Physics and Applications (TIFPA), University of Trento, Trento, Italy
- Md. Arif Abdulla Samy
- Department of Industrial Engineering, University of Trento, Trento, Italy
- Bjarne Stugu
- Department of Physics and Technology, University of Bergen, Bergen, Norway
- Leonardo Vannoli
- National Institute of Nuclear Physics (INFN) of Genova, Genoa, Italy
- Leonardo Vannoli
- 0Department of Physics, University of Genoa, Genoa, Italy
- DOI
- https://doi.org/10.3389/fphy.2021.624668
- Journal volume & issue
-
Vol. 9
Abstract
The ATLAS experiment will undergo a full replacement of its inner detector to face the challenges posed by the High Luminosity upgrade of the Large Hadron Collider (HL-LHC). The new Inner Tracker (ITk) will have to deal with extreme particle fluences. Due to its superior radiation hardness the 3D silicon sensor technology has been chosen to instrument the innermost pixel layer of ITk, which is the most exposed to radiation damage. Three foundries (CNM, FBK, and SINTEF), have developed and fabricated novel 3D pixel sensors to meet the specifications of the new ITk pixel detector. These are produced in a single-side technology on either Silicon On Insulator (SOI) or Silicon on Silicon (Si-on-Si) bonded wafers by etching both n- and p-type columns from the same side. With respect to previous generations of 3D sensors they feature thinner active substrates and smaller pixel cells of 50 × 50 and 25 × 100 µm2. This paper reviews the main design and technological issues of these novel 3D sensors, and presents their characterization before and after exposure to large radiation doses close to the one expected for the innermost layer of ITk. The performance of pixel modules, where the sensors are interconnected to the recently developed RD53A chip prototype for HL-LHC, has been investigated in the laboratory and at beam tests. The results of these measurements demonstrate the excellent radiation hardness of this new generation of 3D pixel sensors that enabled the project to proceed with the pre-production for the ITk tracker.
Keywords
- solid state detectors
- radiation-hard charged-particle detectors
- 3D silicon detectors
- tracking detectors
- ATLAS experiment
- high energy physics (HEP)
