Nano-fiber-structured Cantor alloy films prepared by sputtering

Abstract

High entropy alloy films (HEAFs) have received increasing attention in recent years due to their excellent properties, such as high wear resistance, corrosion resistance, magnetic and optical properties. By using Direct Current (DC) magnetron sputtering, Cantor (CoCrFeMnNi) alloy films were deposited at various sputtering powers. The composition, microstructure, and mechanical properties of the films deposited at different sputtering powers were investigated. The Cantor alloy films deposited at various sputtering powers of 80, 100, 120 and 150 W showed a face-centered-cubic nanocrystalline structure. As sputtering power was increased, the films showed a nano-fiber-structured growth pattern and larger grain size. Hardness of the Cantor alloy film prepared at 80 W is 8.9 GPa, which is considerably higher than that of the bulk alloy of 1.4 GPa. This work indicates that the phase structure of the Cantor alloy films is consistent with that of the bulk alloy, while the microstructure is totally different showing a nano-fiber-structure and much harder than the bulk, which implies that nanostructured Cantor alloy films can be designed as high-hardness wear-resistant coatings.

Keywords

• Cantor alloy films
• DC magnetron sputtering
• Microstructure
• Nano-fiber-structure
• Hardness