A Novel Approach to Measure the Hydraulic Capacitance of a Microfluidic Membrane Pump

Abstract

A novel approach was proposed to measure the hydraulic capacitance of a microfluidic membrane pump. Membrane deflection equations were modified from various studies to propose six theoretical equations to estimate the hydraulic capacitance of a microfluidic membrane pump. Thus, measuring the center deflection of the membrane allows the corresponding pressure and hydraulic capacitance of the pump to be determined. This study also investigated how membrane thickness affected the Young’s modulus of a polydimethylsiloxane (PDMS) membrane. Based on the experimental results, a linear correlation was proposed to estimate the hydraulic capacitance. The measured hydraulic capacitance data and the proposed equations in the linear and nonlinear regions qualitatively exhibited good agreement.