Carbon Nanotube Electron Emitter for X-ray Imaging

Abstract

The carbon nanotube field emitter array was grown on silicon substrate through a resist-assisted patterning (RAP) process. The shape of the carbon nanotube array is elliptical with 2.0 × 0.5 mm2 for an isotropic focal spot size at anode target. The field emission properties with triode electrodes show a gate turn-on field of 3 V/µm at an anode emission current of 0.1 mA. The author demonstrated the X-ray source with triode electrode structure utilizing the carbon nanotube emitter, and the transmitted X-ray image was of high resolution.

Keywords

• carbon nanotube
• X-ray
• resist assisted patterning