β-Ga2O3 Deposited via MOCVD for Mid-Infrared Polarization Control

Ceneda Daniele; Centini Marco; Dereshgi Sina Abedini; Aydin Koray; Larciprete Maria Cristina

doi:10.1051/epjconf/202328705042

EPJ Web of Conferences (Jan 2023)

β-Ga2O3 Deposited via MOCVD for Mid-Infrared Polarization Control

Ceneda Daniele,
Centini Marco,
Dereshgi Sina Abedini,
Aydin Koray,
Larciprete Maria Cristina

Affiliations

Ceneda Daniele: Department of Basic and Applied Sciences for Engineering, Sapienza, University of Rome
Centini Marco: Department of Basic and Applied Sciences for Engineering, Sapienza, University of Rome
Dereshgi Sina Abedini: Department of Electrical and Computer Engineering, Northwestern University
Aydin Koray: Department of Electrical and Computer Engineering, Northwestern University
Larciprete Maria Cristina: Department of Basic and Applied Sciences for Engineering, Sapienza, University of Rome

DOI: https://doi.org/10.1051/epjconf/202328705042
Journal volume & issue: Vol. 287
p. 05042

Abstract

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We performed infrared optical characterization of polycrystalline β-Ga2O3 films, in the 10-18 μm range, deposited by metal organic chemical vapor deposition on sapphire substrates. Our results show that it is possible to obtain a dominant β-phase film, with a well-defined, normal to surface z-axis orientation. These results are confirmed by reflection spectra performed at 45° incidence angle which reveals a z-phonon Reststrahlen band as a function of the incident field linear polarization.

Published in EPJ Web of Conferences

ISSN: 2100-014X (Online)
Publisher: EDP Sciences
Country of publisher: France
LCC subjects: Science: Physics
Website: http://www.epj-conferences.org/

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