The perspective combination of laser micromilling technology and jet (aerosol) printing technologies for ceramic MEMS producing of microhotplate in the surface mounted device (SMD) package for the metal oxide (MOX) sensor is describing. There are discusses technological and economic aspects of small-scale production of gas MOX sensors. Experiments with laser micromilling of Al2O3 ceramics confirmed possibility to produce MEMS microhotplate for MOX gas sensor in SMD package with form-factor SOT-23. Developed technology process is close to 3D prototype philosophy—rapid, simple and cheap.
