A Micropowered Chemoresistive Sensor Based on a Thin Alumina Nanoporous Membrane and Sn<sub>x</sub>Bi<sub>k</sub>Mo<sub>y</sub>O<sub>z</sub> Nanocomposite
Gennady Gorokh,
Anna Zakhlebayeva,
Igor Taratyn,
Andrei Lozovenko,
Valery Zhylinski,
Michael Iji,
Vladimir Fedosenko,
Abdelhafed Taleb
Affiliations
Gennady Gorokh
R&D Laboratory of Nanotechnologies, Belarusian State University of Informatics and Radioelectronics, 220013 Minsk, Belarus
Anna Zakhlebayeva
R&D Laboratory of Nanotechnologies, Belarusian State University of Informatics and Radioelectronics, 220013 Minsk, Belarus
Igor Taratyn
Instrumentation Engineering Faculty, Micro- and Nanotechnology Department, Belarusian National Technical University, 220013 Minsk, Belarus
Andrei Lozovenko
R&D Laboratory of Nanotechnologies, Belarusian State University of Informatics and Radioelectronics, 220013 Minsk, Belarus
Valery Zhylinski
Department of Chemistry, Technology of Electrochemical Production and Electronic Materials, Belarusian State Technological University, 220006 Minsk, Belarus
Michael Iji
R&D Laboratory of Nanotechnologies, Belarusian State University of Informatics and Radioelectronics, 220013 Minsk, Belarus
Vladimir Fedosenko
R&D Laboratory of Nanotechnologies, Belarusian State University of Informatics and Radioelectronics, 220013 Minsk, Belarus
Abdelhafed Taleb
Institut de Recherche de Chimie Paris, Chimie ParisTech, PSL University—CNRS, 75005 Paris, France
This work presents and discusses the design of an efficient gas sensor, as well as the technological process of its fabrication. The optimal dimensions of the different sensor elements including their deformation were determined considering the geometric modeling and the calculated moduli of the elasticity and thermal conductivity coefficients. Multicomponent SnxBikMoyOz thin films were prepared by ionic layering on an anodic alumina membrane and were used as gas-sensitive layers in the sensor design. The resistance of the SnxBikMoyOz nanostructured film at temperatures up to 150 °C exceeded 106 Ohm but decreased to 104 Ohm at 550 °C in air. The sensitivity of the SnxBikMoyOz composite to concentrations of 5 and 40 ppm H2 at 250 °C (10 mW) was determined to be 0.22 and 0.40, respectively.
