Pinhole microLED Array as Point Source Illumination for Miniaturized Lensless Cell Monitoring Systems
Shinta Mariana,
Gregor Scholz,
Feng Yu,
Agus Budi Dharmawan,
Iqbal Syamsu,
Joan Daniel Prades,
Andreas Waag,
Hutomo Suryo Wasisto
Affiliations
Shinta Mariana
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
Gregor Scholz
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
Feng Yu
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
Agus Budi Dharmawan
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
Iqbal Syamsu
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
Joan Daniel Prades
MIND, Department of Electronic and Biomedical Engineering, Universitat de Barcelona, 08028 Barcelona, Spain
Andreas Waag
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
Hutomo Suryo Wasisto
Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
Pinhole‐shaped light‐emitting diode (LED) arrays with dimension ranging from 100 μm down to 5 μm have been developed as point illumination sources. The proposed microLED arrays, which are based on gallium nitride (GaN) technology and emitting in the blue spectral region (λ = 465 nm), are integrated into a compact lensless holographic microscope for a non‐invasive, label‐free cell sensing and imaging. From the experimental results using single pinhole LEDs having a diameter of 90 μm, the reconstructed images display better resolution and enhanced image quality compared to those captured using a commercial surface‐mount device (SMD)‐based LED.