APL Materials (Nov 2022)

Formation of tubular conduction channel in a SiGe(P)/Si core/shell nanowire heterostructure

  • Xuejing Wang,
  • Yung-Chen Lin,
  • Chia-Tse Tai,
  • Seok Woo Lee,
  • Tzu-Ming Lu,
  • Sun Hae Ra Shin,
  • Sadhvikas J. Addamane,
  • Chris Sheehan,
  • Jiun-Yun Li,
  • Yerim Kim,
  • Jinkyoung Yoo

DOI
https://doi.org/10.1063/5.0119654
Journal volume & issue
Vol. 10, no. 11
pp. 111108 – 111108-7

Abstract

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Realizing a tubular conduction channel within a one-dimensional core–shell nanowire (NW) enables better understanding of quantum phenomena and exploration of electronic device applications. Herein, we report the growth of a SiGe(P)/Si core/shell NW heterostructure using a chemical vapor deposition coupled with vapor–liquid–solid growth mechanism. The entire NW heterostructure behaves as a p-type semiconductor, which demonstrates that the high-density carriers are confined within the 4 nm-thick Si shell and form a tubular conduction channel. These findings are confirmed by both calculations and the gate-dependent current–voltage (Id–Vg) characteristics. Atomic resolution microscopic analyses suggest a coherent epitaxial core/shell interface where strain is released by forming dislocations along the axial direction of the NW heterostructure. Additional surface passivation achieved via growing a SiGe(P)/Si/SiGe core/multishell NW heterostructure suggests potential strategies to enhance the tubular carrier density, which could be further modified by improving multishell crystallinity and structural design.