Micromachines (Feb 2024)

A Multidisciplinary Approach toward CMOS Capacitive Sensor Array for Droplet Analysis

  • Hamed Osouli Tabrizi,
  • Saghi Forouhi,
  • Tayebeh Azadmousavi,
  • Ebrahim Ghafar-Zadeh

DOI
https://doi.org/10.3390/mi15020232
Journal volume & issue
Vol. 15, no. 2
p. 232

Abstract

Read online

This paper introduces an innovative method for the analysis of alcohol–water droplets on a CMOS capacitive sensor, leveraging the controlled thermal behavior of the droplets. Using this sensing method, the capacitive sensor measures the total time of evaporation (ToE), which can be influenced by the droplet volume, temperature, and chemical composition. We explored this sensing method by introducing binary mixtures of water and ethanol or methanol across a range of concentrations (0–100%, with 10% increments). The experimental results indicate that while the capacitive sensor is effective in measuring both the total ToE and dielectric properties, a higher dynamic range and resolution are observed in the former. Additionally, an array of sensing electrodes successfully monitors the droplet–sensor surface interaction. However practical considerations such as the creation of parasitic capacitance due to mismatch, arise from the large sensing area in the proposed capacitive sensors and other similar devices. In this paper, we discuss this non-ideality and propose a solution. Also, this paper showcases the benefits of utilizing a CMOS capacitive sensing method for accurately measuring ToE.

Keywords