Interaction of impurity distribution and groove at the micro-zone of solid/liquid interface in silicon

Zhiqiang Hu; Jiayan Li; Yi Tan; Dachuan Jiang; Pengting Li

Materials & Design (Feb 2022)

Interaction of impurity distribution and groove at the micro-zone of solid/liquid interface in silicon

Zhiqiang Hu,
Jiayan Li,
Yi Tan,
Dachuan Jiang,
Pengting Li

Affiliations

Zhiqiang Hu: Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Dalian University of Technology), Ministry of Education, School of Materials Science and Engineering, Dalian 116024, China; Key Laboratory for Energy Beam Metallurgy and Advanced Materials Preparation of Liaoning Province, Dalian 116024, China
Jiayan Li: Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Dalian University of Technology), Ministry of Education, School of Materials Science and Engineering, Dalian 116024, China; Key Laboratory for Energy Beam Metallurgy and Advanced Materials Preparation of Liaoning Province, Dalian 116024, China
Yi Tan: Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Dalian University of Technology), Ministry of Education, School of Materials Science and Engineering, Dalian 116024, China; Key Laboratory for Energy Beam Metallurgy and Advanced Materials Preparation of Liaoning Province, Dalian 116024, China
Dachuan Jiang: Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Dalian University of Technology), Ministry of Education, School of Materials Science and Engineering, Dalian 116024, China; Key Laboratory for Energy Beam Metallurgy and Advanced Materials Preparation of Liaoning Province, Dalian 116024, China
Pengting Li: Corresponding author at: School of Materials Science and Engineering, Dalian University of Technology, No. 2 Linggong Road, Ganjingzi District, Dalian 116024, China.; Key Laboratory of Materials Modification by Laser, Ion and Electron Beams (Dalian University of Technology), Ministry of Education, School of Materials Science and Engineering, Dalian 116024, China; Key Laboratory for Energy Beam Metallurgy and Advanced Materials Preparation of Liaoning Province, Dalian 116024, China

Journal volume & issue: Vol. 214
p. 110384

Abstract

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Groove, as a special structure at the front of solid–liquid (S/L) interface, takes a great influence on the distribution of impurities for silicon. In this work, the interaction between grooves and impurities was studied, and the evolution model of groove was proposed. It has been found that the crystal growth rate and the impurity content in the groove determine the evolution behavior of the groove. Correspondingly, the migration behavior of impurities in groove with solidification was studied and the mathematical model was proposed to describe the anomalous enrichment phenomenon. This work is helpful to understand the distribution behavior of impurities in micro-zone such as groove and make a theoretical foundation for the deep removal of impurities.

Published in Materials & Design

ISSN: 0264-1275 (Print); 1873-4197 (Online)
Publisher: Elsevier
Country of publisher: United Kingdom
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
Website: https://www.journals.elsevier.com/materials-and-design

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