MEMS and ECM Sensor Technologies for Cardiorespiratory Sound Monitoring—A Comprehensive Review

Abstract

This paper presents a comprehensive review of cardiorespiratory auscultation sensing devices (i.e., stethoscopes), which is useful for understanding the theoretical aspects and practical design notes. In this paper, we first introduce the acoustic properties of the heart and lungs, as well as a brief history of stethoscope evolution. Then, we discuss the basic concept of electret condenser microphones (ECMs) and a stethoscope based on them. Then, we discuss the microelectromechanical systems (MEMSs) technology, particularly focusing on piezoelectric transducer sensors. This paper comprehensively reviews sensing technologies for cardiorespiratory auscultation, emphasizing MEMS-based wearable designs in the past decade. To our knowledge, this is the first paper to summarize ECM and MEMS applications for heart and lung sound analysis.

Keywords

• microelectromechanical systems (MEMSs)
• electret condenser microphone (ECM)
• wearable sensing devices
• cardiorespiratory auscultation
• phonocardiography (PCG)
• heart sound