A novel gate-all-around with back-gate (GAAB) 3D NAND flash memory structure for high performance with disturbance-less program operation

Abstract

In this paper, we propose a gate-all-around with back-gate (GAAB) 3D NAND flash memory structure for high performance and reliability. First, in the selected string, we confirmed that the proposed structure can improve program performance using negative bit-line voltage scheme with pass disturbance-less characteristic. Second, in the inhibited string, we confirmed self-boosting, which is perfectly performed by the back-gate bias without the unselected WL. Based on these potentials of the GAAB NAND structure, we would like to propose our GAAB structure as a future structure with the advantages of high performance and high reliability characteristics compared with conventional GAA-type NAND flash memory.

Keywords

• 3D NAND flash memory
• Gate-all-around with back gate (GAAB)
• Pass disturbance
• Program disturbance
• Program operation
• Self-boosting