No external load measurement strategy for micro thermoelectric generator based on high-performance Si1−x−yGexSny film

Ying Peng; Sijing Zhu; Huajun Lai; Jie Gao; Masashi Kurosawa; Osamu Nakatsuka; Sakae Tanemura; Biaolin Peng; Lei Miao

Journal of Materiomics (Jul 2021)

No external load measurement strategy for micro thermoelectric generator based on high-performance Si1−x−yGexSny film

Ying Peng,
Sijing Zhu,
Huajun Lai,
Jie Gao,
Masashi Kurosawa,
Osamu Nakatsuka,
Sakae Tanemura,
Biaolin Peng,
Lei Miao

Affiliations

Ying Peng: Guangxi Key Laboratory of Information Material, School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin, 541004, China
Sijing Zhu: Guangxi Key Laboratory of Information Material, School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin, 541004, China
Huajun Lai: Guangxi Key Laboratory of Information Material, School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin, 541004, China
Jie Gao: Guangxi Key Laboratory of Information Material, School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin, 541004, China
Masashi Kurosawa: Department of Materials Physics, Graduate School of Engineering, Nagoya University, Nagoya, 464-8603, Japan; PRESTO, Japan Science and Technology Agency, 4-1-8, Honcho, Kawaguchi, Saitama, 332-0012, Japan
Osamu Nakatsuka: Department of Materials Physics, Graduate School of Engineering, Nagoya University, Nagoya, 464-8603, Japan; Institute of Materials and Systems for Sustainability, Nagoya University, Nagoya, 464-8601, Japan
Sakae Tanemura: Guangxi Key Laboratory of Information Material, School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin, 541004, China; Japan Fine Ceramics Center, 2-4-1 Mutsuno, Atsuta-ku, Nagoya, 456-8587, Japan
Biaolin Peng: Center on Nanoenergy Research, Guangxi Key Laboratory of Processing for Non-ferrous Metal and Featured Materials, Guangxi Key Laboratory for Relativity Astrophysics, Nanning, 530004, China
Lei Miao: Guangxi Key Laboratory of Information Material, School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin, 541004, China; Department of Materials Science and Engineering, SIT Research Laboratories, Innovative Global Program, Faculty of Engineering, Shibaura Institute of Technology, Tokyo, 135-8548, Japan; Corresponding author. Guangxi Key Laboratory of Information Material, School of Material Science and Engineering, Guilin University of Electronic Technology, Guilin, 541004, China.

Journal volume & issue: Vol. 7, no. 4
pp. 665 – 671

Abstract

Read online

In this study, a micro in-plane p-type thermoelectric generator (TEG), which consists of thin-film Si1−x−yGexSny ternary alloy semiconductor on insulator, is developed to make efficient use of waste heat such as human body. A power factor value as high as 1095 μWm−1K−2 had been achieved using B-ion implanted and short-term rapid thermal annealing (RTA) process. In addition, a measuring scheme for micro TEG without external load resistance was designed. In one measuring session, multiple parameters can be measured. The micro single-arm TEG prepared by semiconductor process can output 0.29 nW power at a temperature difference of 15 K, and a cross-sectional power density has reached up to 0.58 mW/cm2, which is a superior value for wearable device. The findings of this study have important reference value for wearable device performance improvement and output power measuring of micro TEG.

Published in Journal of Materiomics

ISSN: 2352-8478 (Print); 2352-8486 (Online)
Publisher: Elsevier
Country of publisher: Netherlands
LCC subjects: Technology: Electrical engineering. Electronics. Nuclear engineering: Materials of engineering and construction. Mechanics of materials
Website: https://www.sciencedirect.com/journal/journal-of-materiomics

About the journal

Abstract

Keywords