Resonant vacuum gauge

V. N. Gorobey; R. E. Kuvandykov; R. A. Teteruk

doi:10.20915/2687-0886-2020-16-1-17-23

Standartnye Obrazcy (Jun 2020)

Resonant vacuum gauge

V. N. Gorobey,
R. E. Kuvandykov,
R. A. Teteruk

Affiliations

V. N. Gorobey: D. I. Mendeleyev Institute for Metrology
R. E. Kuvandykov: D. I. Mendeleyev Institute for Metrology
R. A. Teteruk: D. I. Mendeleyev Institute for Metrology

DOI: https://doi.org/10.20915/2687-0886-2020-16-1-17-23
Journal volume & issue: Vol. 16, no. 1
pp. 17 – 23

Abstract

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This article is devoted to development and research of sensitive elements, transducers and vacuum gauges created by resonant method and intended for measuring absolute pressure in a wide range from 10 to 104 Pa.

Published in Standartnye Obrazcy

ISSN: 2077-1177 (Print)
Publisher: Ural Research Institute of Metrology
Country of publisher: Russian Federation
LCC subjects: Technology
Website: http://www.rmjournal.ru

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Abstract

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