Modelling Cross Axis Sensitivity in MEMS Coriolis Vibratory Gyroscopes

Abstract

In this paper a Cross Axis evaluation methodology is presented. The Cross Axis Sensitivity value depends on backend testing position tolerances as well as technological features and design properties of the MEMS gyroscope. A numerical model was developed to take into account the sources of cross axis related to the last two contributions, not considering backend tolerances. Given a specific structure for the AM gyroscope, the asymmetries in the MEMS structure are acknowledged as the main sources for the cross axis. The results of the harmonic FEM simulations were finally compared with real testing data, thus proving the validity of the developed FEM model.

Keywords

• MEMS
• AM gyroscope
• cross-axis sensitivity
• FEM model