Micromachines (Oct 2024)

Investigation of an Innovative Roll-to-Plate (R2P) Hot-Embossing Process for Microstructure Arrays of Infrared Glass

  • Qinjun Li,
  • Kangsen Li,
  • Jinyu Lv,
  • Linglong Tao,
  • Feng Gong

DOI
https://doi.org/10.3390/mi15111307
Journal volume & issue
Vol. 15, no. 11
p. 1307

Abstract

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The roller-to-plate (R2P) hot-embossing process is an effective, low-cost method for producing high-quality micro-/nano-optical components. In the field of night vision applications, the fabrication of chalcogenide glass microstructures is emerging as a promising alternative to traditional infrared glass. This trend is driven by the potential of chalcogenide glass to surpass conventional materials in terms of performance. However, the development of R2P hot embossing faces challenges, such as the high cost of curved mold manufacturing, the reliance on roll-to-roll processes for nano hot embossing, the limitations of plastic materials, and the unclear viscoelastic properties of infrared glass. In this study, a novel R2P hot-embossing process was developed to fabricate flat chalcogenide glass structures. The key parameters, such as roller temperature, speed, and embossing pressure, were investigated to understand their impact on the glass-filling performance. The deformation mechanism of the glass microstructures was also analyzed. The experimental results show that the R2P hot-embossing method offers excellent reproducibility, achieving a maximum filling rate of 96% and an average roughness deviation of 8.36 nm. The increase in the roller temperature and embossing force increased the filling height of the glass microstructure arrays, while an increase in the roller speed decreased the filling height. Different embossing methods, including variations in speed, temperature, and force, are summarized to analyze the structural changes during embossing. This study provides a foundation and a basis for future research on the roller-to-plate hot embossing process.

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