Nature Communications (Jun 2022)

Tailoring electron beams with high-frequency self-assembled magnetic charged particle micro optics

  • R. Huber,
  • F. Kern,
  • D. D. Karnaushenko,
  • E. Eisner,
  • P. Lepucki,
  • A. Thampi,
  • A. Mirhajivarzaneh,
  • C. Becker,
  • T. Kang,
  • S. Baunack,
  • B. Büchner,
  • D. Karnaushenko,
  • O. G. Schmidt,
  • A. Lubk

DOI
https://doi.org/10.1038/s41467-022-30703-y
Journal volume & issue
Vol. 13, no. 1
pp. 1 – 9

Abstract

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Electron beam manipulation is important for their application in microscopes, lithography instruments, and colliders. Here the authors report a wafer scale, self-assembled, microcoil electrically-driven magnetic charge particle optic device that can be implemented into different configurations for controlling of electron beams.