Our contribution focuses on humidity gas-sensing device formation of metal oxide materials such as BaTiO3 nanorods and TiO2-BaTiO3 nanotubes. Processing of humidity sensors based on BaTiO3 nanostructured materials, that can operate under severe environmental conditions is of great relevance due to their small size and small weight. As a result, these sensors possess high stability, fast response times and reproducibility. Furthermore, gas sensor properties are not only interesting in terms of device applications, but also pave the way to study in deep ionic and electronic conduction mechanisms in individual nano-based devices.