Engineering Optimization of Producing High-Purity Dichlorosilane in a Fixed-Bed Reactor by Trichlorosilane Decomposition
Jian-Hua Liu,
Bang-Jie Zhang,
Zhen-Jun Yuan,
De-Ren Yang,
Ye Wan,
Xue-Gong Yu
Affiliations
Jian-Hua Liu
State Key Lab of Silicon and Advanced Semiconductor Materials and School of Materials Science & Engineering, Zhejiang University, Hangzhou, P. R. China
Bang-Jie Zhang
State Key Lab of Silicon and Advanced Semiconductor Materials and School of Materials Science & Engineering, Zhejiang University, Hangzhou, P. R. China
Zhen-Jun Yuan
National Engineering Research Center of Silicon-based Materials Manufacturing Technology, Luoyang, P. R. China
De-Ren Yang
State Key Lab of Silicon and Advanced Semiconductor Materials and School of Materials Science & Engineering, Zhejiang University, Hangzhou, P. R. China
Ye Wan
National Engineering Research Center of Silicon-based Materials Manufacturing Technology, Luoyang, P. R. China
Xue-Gong Yu
State Key Lab of Silicon and Advanced Semiconductor Materials and School of Materials Science & Engineering, Zhejiang University, Hangzhou, P. R. China
