Parameter Optimization and Electrode Improvement of Rotary Stepper Micromotor

Abstract

We developed a three-phase electrostatic stepper micromotor and performed a numerical simulation to improve its performance for practical use and to optimize its design. We conducted its circuit simulation by simplifying its structure, and the effect of springback force generated by supported mechanism using flexures was considered. And we considered new improvement method for electrodes. This improvement and other parameter optimizations achieved the low voltage drive of micromotor.

Keywords

• mems
• circuit simulation
• micromotor
• fem analysis
• parameter design.