Temperature Effects on the Propagation Characteristics of Love Waves along Multi-Guide Layers of Sio<sub>2</sub>/Su-8 on St-90°X Quartz

Abstract

Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (<em>Tcf</em>) of the fabricated Love wave devices with guide layers of SU-8/SiO₂ on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm.

Keywords

• Love wave
• multi-guide
• SU-8
• SiO&lt;sub&gt;2&lt;/sub&gt;
• ST-90°X quartz
• &lt;em&gt;Tcf&lt;/em&gt;