Determination of microrelief of the sample by singular beams superposition

Abstract

In present paper we propose easy way to implement method of interfering vortices with opposite topological charge for the real time determination of the thickness and information about the surface of studied samples with the resolution up to 7 nanometers. The determination of the characteristics of the medial cross-section of submicron-objects becomes possible due to phase sensitivity of interfering singular beams to the slightest changes in the optical path difference between them. The dependence of rotational angle of resulting interference pattern in case of different sample thickness for two singular beams superposition is considered in detail.

Keywords

• optical vortex
• phase
• optical microscopy
• singular beams
• surface relief detection