All-gas-phase synthesis of UiO-66 through modulated atomic layer deposition

Kristian Blindheim Lausund; Ola Nilsen

doi:10.1038/ncomms13578

Nature Communications (Nov 2016)

All-gas-phase synthesis of UiO-66 through modulated atomic layer deposition

Kristian Blindheim Lausund,
Ola Nilsen

Affiliations

Kristian Blindheim Lausund: Department of Chemistry, Centre for Materials Science and Nanotechnology (SMN), University of Oslo, P.O. Box 1033 Blindern
Ola Nilsen: Department of Chemistry, Centre for Materials Science and Nanotechnology (SMN), University of Oslo, P.O. Box 1033 Blindern

DOI: https://doi.org/10.1038/ncomms13578
Journal volume & issue: Vol. 7, no. 1
pp. 1 – 9

Abstract

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Thin films of metal-organic frameworks (MOFs) are promising for catalysis, gas storage, and microelectronics. Here, the authors introduce a vapour-phase synthesis of UiO-66 thin films, beginning with modulated atomic layer deposition of porous, amorphous films, followed by acetic acid vapour-enabled crystallization to the MOF structure.

Published in Nature Communications

ISSN: 2041-1723 (Online)
Publisher: Nature Portfolio
Country of publisher: United Kingdom
LCC subjects: Science
Website: https://www.nature.com/ncomms/

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