Femtosecond laser processing of fused silica: from process characterization to applications in optomechanics

Abstract

Non-linear laser-matter interaction offers the possibility to structure dielectric materials in three dimensions. Among dielectrics, fused silica has brought particular attention because of its suitability for a variety of applications from optofluidics to integrated optics and from optical components to mechanics and optomechanics. Multiple aspects of this laser-matter interaction remains elusive. Here we discuss some aspects of it from the viewpoint of micromechanics.