Nature Communications (Jun 2019)

Highly stacked 3D organic integrated circuits with via-hole-less multilevel metal interconnects

  • Hocheon Yoo,
  • Hongkeun Park,
  • Seunghyun Yoo,
  • Sungmin On,
  • Hyejeong Seong,
  • Sung Gap Im,
  • Jae-Joon Kim

DOI
https://doi.org/10.1038/s41467-019-10412-9
Journal volume & issue
Vol. 10, no. 1
pp. 1 – 9

Abstract

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Though large-scale integration of organic transistors into integrated circuits via 3D stacking is a promising approach, reliable methods of device fabrication are still needed. Here, the authors report a metal interconnect scheme for reliable fabrication of 3D integrated organic transistor circuits.