Fabrication and characterization of NbTi microwave superconducting resonators

Abstract

Superconducting resonators are widely used in fields spanning from quantum computing to electron spin resonance (ESR) spectroscopy. With the goal of realizing superconducting resonators, a broad variety and combination of superconducting materials, substrates and fabrication processes have been used and thoroughly reported in the literature. High temperature superconductors such as YBCO and low temperature superconductors such as Nb, NbN, NbTiN and Al are the major actors in the domain. In this work, we investigate the possibility to extend the family of suitable low temperature superconductors for the realization of planar superconducting microwave resonators for future ESR applications. In particular, this study focuses on NbTi, a widely used material to realize superconducting cables but not investigated for planar resonating structures at GHz frequencies. A 150 nm thick film of NbTi is sputtered and patterned on top of an Al2O3 substrate. For devices resonating around 6.8 GHz quality factors greater than 10,000 are observed at 3 K and in magnetic fields up to 250 mT.

Keywords

• Superconducting resonators
• NbTi
• Microfabrication
• Direct photolitography
• Ion beam etching