Heater-Integrated Cantilevers for Nano-Samples Thermogravimetric Analysis

Abstract

The design and characteristics of a micro-system for thermogravimetric analysis (TGA) in which heater, temperature sensor and mass sensor are integrated into a single device are presented. The system consists of a suspended cantilever that incorporates a microfabricated resistor, used as both heater and thermometer. A three-dimensional finite element analysis was used to define the structure parameters. TGA sensors were fabricated by standard microlithographic techniques and tested using milli-Q water and polyurethane microcapsule. The results demonstrated that our approach provides a faster and more sensitive TGA with respect to commercial systems.

Keywords

• microelectromechanical system (MEMS) resonator
• mass sensing
• thermogravimetric analysis (TGA)
• microcapsules