Qualitative Identification of the Static Pull-In and Fundamental Frequency of One-Electrode MEMS Resonators

Abstract

This paper attempts to qualitatively identify the static pull-in position, pull-in voltage, and fundamental frequency of one-electrode microresonators from a physical perspective. During theoretical derivation, a generalized one-degree-of-freedom (1-DOF) model in nondimensional form derived using the differential quadrature method (DQM) is first introduced and then transformed for frequency normalization. Based on the deduced formulas, the upper and lower bounds of the static pull-in position and pull-in voltage are both deduced through mathematical proof. To distinguish the monotonic and nonmonotonic behavior of the fundamental frequency versus direct current (DC) voltage, a critical condition decided only by cubic stiffness is then determined. For the first time, two extreme static positions, as well as the corresponding fundamental frequencies and DC voltages to identify different frequency behaviors are derived, and their variations versus cubic stiffness are then discussed and verified. During the simulation process, a high-order DQM and COMSOL 2D model are both applied for numerical analyses. Guided by nondimensional results, typical behaviors with specific physical parameters are examined in detail. Results demonstrate that the curve tendencies between all the qualitative results and quantitative numerical simulations in dimensional form agree well with each other, implying the possibility of using 1-DOF model to qualitatively discuss physical parameters effects on the system statics and dynamics.

Keywords

• MEMS
• resonator
• one-electrode
• static pull-in
• fundamental frequency