Improved Thermal Resistance and Electrical Conductivity of a Boron-Doped DLC Film Using RF-PECVD

• Wanrong Li,
• Xing Yan Tan,
• Yeong Min Park,
• Dong Chul Shin,
• Dae Weon Kim,
• Tae Gyu Kim

Affiliations

Wanrong Li

Department of Nano Fusion Technology, Pusan National University, Busan, South Korea

Xing Yan Tan

Department of Nano Fusion Technology, Pusan National University, Busan, South Korea

Yeong Min Park

Department of Nano Fusion Technology, Pusan National University, Busan, South Korea

Dong Chul Shin

Department of Mechanical Engineering, Koje College, Geoje, South Korea

Dae Weon Kim

School of Intelligent Automobile Engineering, Silla University, Busan, South Korea

Tae Gyu Kim

Department of Nanomechatronics Engineering, Pusan National University, Busan, South Korea