Improved oxidation behavior of Hf0.11Al0.20B0.69 in comparison to Hf0.28B0.72 magnetron sputtered thin films

Abstract

Abstract The oxidation resistance of Hf0.28B0.72 and Hf0.11Al0.20B0.69 thin films was investigated comparatively at 700 °C for up to 8 h. Single-phase solid solution thin films were co-sputtered from HfB2 and AlB2 compound targets. After oxidation at 700 °C for 8 h an oxide scale thickness of 31 $$\pm$$ ± 2 nm was formed on Hf0.11Al0.20B0.69 which corresponds to 14% of the scale thickness measured on Hf0.28B0.72. The improved oxidation resistance can be rationalized based on the chemical composition and the morphology of the formed oxide scales. On Hf0.28B0.72 the formation of a porous, O, Hf, and B-containing scale and the formation of crystalline HfO2 is observed. Whereas on Hf0.11Al0.20B0.69 a dense, primarily amorphous scale containing O, Al, B as well as approximately 3 at% of Hf forms, which reduces the oxidation kinetics significantly by passivation. Benchmarking Hf0.11Al0.20B0.69 with Ti–Al-based boride and nitride thin films with similar Al concentrations reveals superior oxidation behavior of the Hf-Al-based thin film. The incorporation of few at% of Hf in the oxide scale decelerates oxidation kinetics at 700 °C and leads to a reduction in oxide scale thickness of 21% and 47% compared to Ti0.12Al0.21B0.67 and Ti0.27Al0.21N0.52, respectively. Contrary to Ti–Al-based diborides, Hf0.11Al0.20B0.69 shows excellent oxidation behavior despite B-richness.

Keywords

• Thin films
• Coatings
• Borides
• High temperature oxidation
• HfAlB2
• Magnetron sputtering